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Impurity doping method

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
Patent

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Integrated circuit device and fabrication using metal-doped...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
Reexamination Certificate

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Integrated circuits having low resistivity contacts and the...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
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Ion implantation with heavy halogenide compounds

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
Reexamination Certificate

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Isotopically-enriched boron-containing compounds, and...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
Reexamination Certificate

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