LandOfFree - US Patents - Listing for Semiconductor device manufacturing: process,Including control responsive to sensed condition,Optical characteristic sensed

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System and method for determining endpoint in etch processes...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed

Reexamination Certificate

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Temperature control method and semiconductor device...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed

Reexamination Certificate

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Thermal treatment apparatus, thermal treatment method and...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed

Reexamination Certificate

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Tunable alignment geometry

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed

Reexamination Certificate

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Use of scatterometry for in-situ control of gaseous phase...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed

Reexamination Certificate

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Vapor-phase processing method capable of eliminating...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed

Reexamination Certificate

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Variable data compensation for vias or contacts

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed

Reexamination Certificate

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Via alignment, etch completion, and critical dimension measureme

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed

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Wafer protection method

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed

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Wafer thickness control during backside grind

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed

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