Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate
2011-04-19
2011-04-19
Toledo, Fernando L (Department: 2895)
Semiconductor device manufacturing: process
Including control responsive to sensed condition
Optical characteristic sensed
C438S005000, C438S006000, C438S008000, C438S009000, C438S010000, C438S011000, C438S012000, C438S013000, C438S016000, C438S800000, C257SE21530, C392S407000, C362S310000, C362S217060, C362S241000, C362S260000, C362S514000, C362S516000, C362S518000
Reexamination Certificate
active
07927892
ABSTRACT:
A thermal treatment apparatus having a first light source emitting a first light having light diffusion property, a reflectance measuring unit irradiating a treatment target with the light from plural directions by the first light source and determining a light reflectance of the treatment target, a light irradiation controller adjusting an intensity of a second light of a second light source on the basis of the light reflectance, the second light has diffusion property, and a thermal treatment unit irradiating the treatment target with the second light having adjusted the intensity of the second light by the light irradiation controller.
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Fujitsu Semiconductor Limited
Singal Ankush k
Toledo Fernando L
Westerman Hattori Daniels & Adrian LLP
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