4. Semiconductor device manufacturing: process
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Dual trench isolation using single critical lithographic...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Dual-masked field isolation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
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Dual-masked isolation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
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Dummy feature reduction using optical proximity effect...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
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Dummy fill for integrated circuits

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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DUV laser annealing and stabilization of SiCOH films

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive...
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