Reflection type sensor

Reflective pattern with coded beginning and end formed on the su

Reflective wetness detector

Reticle defect printability verification by resist latent...

Reticle for use in rapid determination of average intrafield...

Reticle position detection system

Retroreflective detector

Rotating beam method and system for measuring part edges and...

Rotation and translation measurement with phase sensitive...

Rotational scanning image recording system having both a...

Roughness measuring method and apparatus, using a filter...

Sample positioning method for surface optical diagnostics...

Sample positioning system to improve edge measurements

Scanner and calibration method used therein

Scannerless range imaging system having high dynamic range

Scanning device and method including electric charge movement

Scanning exposure apparatus and device manufacturing method

Scanning exposure method and apparatus

Scanning system for rapid thermal cycle stress/curvature measure

Seam detection and control system