Scanning device and method including electric charge movement

Details Scanning device and method including electric charge movement Scanning device and method including electric charge movement

2005-10-11

2005-10-11

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S208100

Reexamination Certificate

active

06953944

ABSTRACT:
A scanning device and method includes a movable stage on which a specimen is positioned, an irradiating device for electron beam irradiation of the specimen, a detection device for generating a picture of the irradiation region by detecting a secondary beam including secondary or reflected electrons from the irradiation region, and imaging electron optical system for imaging the secondary beam on a detection surface. A secondary beam detector including a fluorescent unit arranged on the detection surface to convert the secondary beam into light, one-dimensional line sensors for forming electric charge by photoelectric conversion, an array imaging element for accumulating the electric charge in a predetermined line of the line sensors, and a two-dimensional imaging element which emits electric charge by means of photoelectric conversion. A corresponding method is also disclosed.

REFERENCES:
patent: 5498874 (1996-03-01), Miyoshi et al.
patent: 5576833 (1996-11-01), Miyoshi et al.
patent: 6265719 (2001-07-01), Yamazaki et al.
patent: 6670602 (2003-12-01), Kohama et al.
patent: 6677587 (2004-01-01), Kohama
patent: 4-242060 (1992-08-01), None
K. Tsuno, “Simulation Of A Wein Filter As Beam Separator In A Low Electron Microscope,”Ultramicroscopy55:127-140.

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