Scanning exposure apparatus and device manufacturing method

Details Scanning exposure apparatus and device manufacturing method Scanning exposure apparatus and device manufacturing method

2005-11-08

2005-11-08

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S559300

Reexamination Certificate

active

06963075

ABSTRACT:
A scanning exposure apparatus includes a surface position adjuster for adjusting the surface position of an object with respect to an image plane of a projection optical system, on the basis of a detection by the surface position detector in the projection, a controller for controlling a moving system and the surface position detector to perform a pre-scan measurement of the surface position of the object, prior to the projection, so as to detect an error, related to the detection through the surface position detector, with respect to each of detection points, which error is attributable to a difference in pattern structure at the detection points in the region, the detected error being used for correcting the adjustment by the surface position adjuster in the projection, and an initializing device for initializing the surface position detector in synchronism with the scan motion and the projection, at the position where the surface position detector has started the detection in the pre-scan measurement.

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