Reticle position detection system

Details Reticle position detection system Reticle position detection system

2006-02-14

2006-02-14

Allen, Stephone B. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S548000, C355S053000

Reexamination Certificate

active

06998629

ABSTRACT:
A reticle position detection system which detects an abnormal position of a reticle in order to prevent damage to the reticle by a reticle fork or pre-alignment unit used to orient the reticle for subsequent internalization into a process tool or other equipment. The reticle position detection system includes a laser beam generator provided on one side of the reticle and a laser beam sensor provided on the opposite side of the reticle. The laser beam generator emits a laser beam which is received by the laser beam sensor in the event that the reticle is correctly positioned for engagement by a reticle fork or pre-alignment unit.

REFERENCES:
patent: 6356616 (2002-03-01), Oshino
patent: 6479201 (2002-11-01), Higashiki
patent: 6485153 (2002-11-01), Ota
patent: 6597006 (2003-07-01), McCord et al.
patent: 6832517 (2004-12-01), Kuo

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