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Process for irradiation producing constant depth/dose profile

Radiant energy – Irradiation of objects or material
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Process for making patterns in resist and for making ion absorpt

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Process for minimizing electrostatic damage and pole tip...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Process for modifying surfaces of materials, and materials...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Process for repositioning atoms on a surface using a scanning tu

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Patent

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Process for repositioning atoms on a surface using a scanning tu

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Process for the irradiation of strand-shaped irradiated...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Process method and apparatus using focused ion beam generating m

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Process method and apparatus using focused ion beam generating m

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Process of and apparatus for cold-cathode electron-beam generati

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Process of and apparatus for cold-cathode electron-beam generati

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Patent

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Process of improving the whitening of a polymeric tampon...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Processing apparatus using fast atom beam

Radiant energy – Irradiation of objects or material
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Processing substrates using direct and recycled radiation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Producing ion beams suitable for ion implantation and improved i

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Producing RF electric fields suitable for accelerating atomic an

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Production of high beam currents at low energies for use in ion

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Programmable particle scatterer for radiation therapy beam...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Projection aligner for integrated circuit fabrication

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Projection ion beam machining apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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