Process method and apparatus using focused ion beam generating m

Details Process method and apparatus using focused ion beam generating m Process method and apparatus using focused ion beam generating m

1994-03-09

1996-04-02

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250423R, 250309, H01J 37317

Patent

active

055043402

ABSTRACT:
A processing method and a processing apparatus realizing the method use a focused ion beam generator. The apparatus includes a plasma or liquid metal ion source producing ions not influencing electric characteristics of a sample, an ion beam generator for extracting ions from the ion source into an ion beam, an ion beam focusing device for focusing the ion beam, an irradiator for irradiating the focused ion beam onto the sample, and a sample chamber in which the sample to be irradiated for processing is installed. The focused ion beam is irradiated onto a sample such as a silicon wafer or device to conduct on a particular position of the sample a fine machining work, a fine layer accumulation, and an analysis.

REFERENCES:
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patent: 4703180 (1982-10-01), Taya
patent: 4774414 (1988-09-01), Umemura et al.
patent: 5055696 (1991-10-01), Haraichi et al.

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