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  5. Irradiation of objects or material
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Irradiation system with ion beam/charged particle beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Irradiation system with ion beam/charged particle beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Irradiation system with ion beam/charged particle beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Isolation mounts for use with vacuum chambers and their...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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