4. Radiant energy
  5. Irradiation of objects or material
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Dual hemispherical collectors

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Dual-mode electron beam lithography machine

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Dual-walled exhaust tubing for vacuum pump

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Dynamic tracking of wafer motion and distortion during...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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