Dual hemispherical collectors

Details Dual hemispherical collectors Dual hemispherical collectors

2006-04-25

2006-04-25

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S50400H, C359S858000, C359S351000

Reexamination Certificate

active

07034320

ABSTRACT:
A system and method for collecting radiation, which may be used in a lithography illumination system. The system comprises a first surface shaped to reflect radiation in a first hemisphere of a source to illuminate in a second hemisphere of the source; and a second surface shaped to reflect radiation in the second hemisphere of the source to an output plane.

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Office Action mailed Oct. 29, 2004—Taiwan Patent Application No. 92135850 (9 pgs.).

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