4. Radiant energy
  5. Irradiation of objects or material
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Exposure system and method using an electron beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Exposure system with exposure controlling acoustooptic element

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Extended life source arc chamber liners

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Extended source e-beam mask imaging system including a light sou

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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External cathode ion source

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Extreme ultraviolet radiation imaging

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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