4. Optics: measuring and testing
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Eddy-optic sensor for object inspection

Optics: measuring and testing – With plural diverse test or art
Reexamination Certificate

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Electrical and optical system and methods for monitoring...

Optics: measuring and testing – With plural diverse test or art
Reexamination Certificate

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Electro-optical sensors for tool and robotic inspection

Optics: measuring and testing – With plural diverse test or art
Patent

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Electromagnetic wave detecting system

Optics: measuring and testing – With plural diverse test or art
Patent

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Endpoint detecting apparatus in a plasma etching system

Optics: measuring and testing – With plural diverse test or art
Patent

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Endpoint detection device for realizing real-time control of...

Optics: measuring and testing – With plural diverse test or art
Reexamination Certificate

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ESCA/Raman spectroscopy system for the analysis of metal...

Optics: measuring and testing – With plural diverse test or art
Reexamination Certificate

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Etch rate monitoring by optical emission spectroscopy

Optics: measuring and testing – With plural diverse test or art
Patent

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