Electrical and optical system and methods for monitoring...

Details Electrical and optical system and methods for monitoring... Electrical and optical system and methods for monitoring...

2011-02-08

2011-02-08

Evans, F. L (Department: 2877)

Optics: measuring and testing

With plural diverse test or art

C356S316000, C324S071200

Reexamination Certificate

active

07884925

ABSTRACT:
A disclosed device comprises an edge bonding seal configured to be mounted to an edge bead of the electrostatic chuck. The edge bonding seal includes a monitoring layer comprised of a first material configured to either emit a species capable of being optically monitored or having an electrical resistance value capable of being monitored, or both. The edge bonding seal further includes an edge bonding layer configured to be interspersed at least between the monitoring layer and the plasma environment. The edge bonding layer is comprised of a second material susceptible to erosion due to reaction with the plasma environment and configured to expose the monitoring layer to the plasma environment upon sufficient exposure to the plasma environment.

REFERENCES:
patent: 5631803 (1997-05-01), Cameron et al.
patent: 5905626 (1999-05-01), Logan et al.
patent: 6894769 (2005-05-01), Ludviksson et al.
patent: 7064812 (2006-06-01), Ludviksson et al.
patent: 2009/0061542 (2009-03-01), Patrick
patent: 0742588 (1996-11-01), None
patent: 1020070009159 (2009-01-01), None
patent: WO-2009143350 (2009-11-01), None
“International Application Serial No. PCT/US2009/044847, Search Report mailed Jan. 13, 2010”, 5 pgs.
“International Application Serial No. PCT/US2009/044847, Written Opinion mailed Jan. 13, 2010”, 3 pgs.
“U.S. Appl. No. 12/887,829 Non-Final Office Action mailed Nov. 8, 2010”, 6 pgs.

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