Optics: measuring and testing – With plural diverse test or art
Reexamination Certificate
2008-02-25
2011-11-01
Geisel, Kara E (Department: 2877)
Optics: measuring and testing
With plural diverse test or art
C156S345250
Reexamination Certificate
active
08049872
ABSTRACT:
An endpoint detection device, a plasma reactor with the endpoint detection device, and an endpoint detection method are provided. The endpoint detection device includes an OES data operation unit, a data selector, a product generator, an SVM, and an endpoint determiner. The OES data operation unit processes reference OES data by normalization and PCA. The data selector selects part of the linear reference loading vectors and selects part of the selected linear reference loading vectors. The product generator outputs at least one reference product value. The SVM performs regression and outputs a prediction product value. The endpoint determiner detects a process wafer etch or deposition endpoint and outputs a detection signal.
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Chae Heeyeop
Han Kwang Hoon
Han Kyounghoon
Kim Kee Hyun
Lee Weon Mook
DMS Co., Ltd.
Geisel Kara E
Volpe and Koenig P.C.
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