Optics: measuring and testing – With plural diverse test or art
Reexamination Certificate
2006-05-09
2006-05-09
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
With plural diverse test or art
C356S073000, C324S244100, C324S754120, C324S765010
Reexamination Certificate
active
07042558
ABSTRACT:
A sensor enables simultaneous or sequential eddy current and optical reflectance measurements of conducting film by providing an eddy current inspection coil and a first and a second optical fiber extending axially through the coil. The eddy current inspection coil is excited by a radio frequency generator and induces eddy currents in the conducting film which are sensed using a detector. The conducting film is illuminated by a first optical fiber, and light which is reflected from the conducting film is transmitted by a second optical fiber to a detector. The combined use of electrical and optical reflectance signals provides a single probe unit that measures both dielectric and conducting transparent and semi-transparent films.
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Nulman Jaim
Sarfaty Moshe
Sreenivasan Ramaswamy
Applied Materials
Fish & Richardson
Lauchman Layla G.
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