Polishing pad surface shape measuring instrument, method of...

Position encoding optical device and method

Position measuring arrangement

Position-sensing device for 3-D profilometers

Precision 3D scanner base and method for measuring...

Process and apparatus for determining surface information...

Process and device for measuring distances on strips of...

Profiling of a component having reduced sensitivity to...

Profiling of a component having reduced sensitivity to...

Profiling of a component having reduced sensitivity to...

Range finder and method

Refractive production of a concentrically fanned structured...

Scanning 3D measurement technique using structured lighting...

Scanning 3D measurement technique using structured lighting...

Scanning phase measuring method and system for an object at...

Scanning phase measuring method and system for an object at...

Scanning system with stereo camera set

Scatterometry metrology using inelastic scattering

Scatterometry metrology using inelastic scattering

Scatterometry structure with embedded ring oscillator, and...