Polishing pad surface shape measuring instrument, method of...

Details Polishing pad surface shape measuring instrument, method of... Polishing pad surface shape measuring instrument, method of...

2008-02-13

2009-02-03

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Shape or surface configuration

C356S614000, C438S014000, C451S005000, C451S041000

Reexamination Certificate

active

07486407

ABSTRACT:
The main sensor15measures the distance Lm to the surface of the pad2a, and the sub-sensor16measures the distance Ls to the surface of the reference block12. What is actually taken as the measured value is the value of (Lm+Ls). The reference block12is used in order to give a reference position for measuring the surface position of the pad2a. Accordingly, correct measurements can be performed even if the position of the movable element9should fluctuate, for example, as a result of deformation of the guiding and holding plate7or guide8. When the motor11is caused to rotate, the ball screw10rotates, so that the movable element9moves leftward and rightward, and the distance to the pad2ais measured. From the measured data of this distance, the circular-conical vertical angle, groove depth, thickness, and the like of the pad2aare determined.

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