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Optical probe for scanning the features of an object and...

Optics: measuring and testing – Shape or surface configuration – Triangulation
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Optical probe for scanning the features of an object and...

Optics: measuring and testing – Shape or surface configuration – Triangulation
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Optical projection system

Optics: measuring and testing – Shape or surface configuration
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Optical reflection sensor

Optics: measuring and testing – Shape or surface configuration
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Optical scatterometry of asymmetric lines and structures

Optics: measuring and testing – Shape or surface configuration
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Optical three-dimensional measurement device and filter...

Optics: measuring and testing – Shape or surface configuration
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Optimization of diffraction order selection for...

Optics: measuring and testing – Shape or surface configuration
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Optimization of diffraction order selection for...

Optics: measuring and testing – Shape or surface configuration
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Optional 3D digitizer, system and method for digitizing an...

Optics: measuring and testing – Shape or surface configuration – Triangulation
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Optoelectronic system using spatiochromatic triangulation

Optics: measuring and testing – Shape or surface configuration – Triangulation
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Overhead dimensioning system and method

Optics: measuring and testing – Shape or surface configuration
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Overlay targets with isolated, critical-dimension features...

Optics: measuring and testing – Shape or surface configuration
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