Optics: measuring and testing – Shape or surface configuration – Triangulation
Reexamination Certificate
2006-03-07
2006-03-07
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
Shape or surface configuration
Triangulation
C356S601000, C356S625000, C250S559190
Reexamination Certificate
active
07009717
ABSTRACT:
An optical probe for measuring features of an object comprises two or more viewing directions and two or more projection directions. A method of measuring the features of an object comprises configuring an optical probe into two or more optical groups, wherein an optical group comprises one or more viewing directions and one or more projection directions, wherein at least one viewing direction and at least one projection direction is different between the optical groups, and wherein data obtained by the viewing directions is generated only from patterns projected by the projection directions of the same optical group. The method further comprises collecting data from each optical group while scanning the object.
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Coppenolle Bart Van
De Jonge Lieven
Thys Frank
Vallons Kris
Knobbe Martens Olson & Bear LLP
Lauchman Layla G.
Metris N.V.
Stock, Jr. Gordon J.
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