Optical three-dimensional measurement device and filter...

Optics: measuring and testing – Shape or surface configuration

Reexamination Certificate

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C356S600000, C356S609000, C382S145000, C250S559220

Reexamination Certificate

active

07817287

ABSTRACT:
This is an optical three-dimensional measurement device provided with observation illumination light for illuminating an observation specimen, an object lens for collecting the observation light on the observation specimen and a display unit for displaying an observation image and its measurement result that are obtained via the object lens. The optical three-dimensional measurement device comprises a filter process determination unit for determining a first filter process on the basis of observation conditions used when taking in a three-dimensional image of the observation specimen and a filter process unit for applying the first filter process determined by the filter process determination unit to the measurement image or the measurement result.

REFERENCES:
patent: 5614662 (1997-03-01), Hallan et al.
patent: 5812269 (1998-09-01), Svetkoff et al.
patent: 6166853 (2000-12-01), Sapia et al.
patent: 7576869 (2009-08-01), Fujii
patent: 2005/0270639 (2005-12-01), Miki
patent: 2009/0153878 (2009-06-01), Fujii
patent: 2004-184194 (2004-07-01), None

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