Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate
2006-06-13
2006-06-13
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Shape or surface configuration
Reexamination Certificate
active
07061627
ABSTRACT:
A method for analyzing asymmetric structures (including isolated and periodic structures) includes a split detector for use in a broadband spectrometer. The split has detector has separate right and left halves. By independently measuring and comparing the right and left scattered rays, information about asymmetries can be determined.
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Opsal Jon
Rosencwaig Allan
Geisel Kara
Stallman & Pollock LLP
Therma-Wave, Inc.
Toatley , Jr. Gregory J.
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