Optical scatterometry of asymmetric lines and structures

Details Optical scatterometry of asymmetric lines and structures Optical scatterometry of asymmetric lines and structures

2006-06-13

2006-06-13

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

Reexamination Certificate

active

07061627

ABSTRACT:
A method for analyzing asymmetric structures (including isolated and periodic structures) includes a split detector for use in a broadband spectrometer. The split has detector has separate right and left halves. By independently measuring and comparing the right and left scattered rays, information about asymmetries can be determined.

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