Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate
2008-09-23
2008-09-23
Lauchman, L. G. (Department: 2877)
Optics: measuring and testing
Shape or surface configuration
C356S445000, C356S600000
Reexamination Certificate
active
11388265
ABSTRACT:
The number of diffraction orders to use in generating simulated diffraction signals for a two-dimensional structure in optical metrology is selected by generating a first simulated diffraction signal using a first number of diffraction orders and a hypothetical profile of the two-dimensional structure. A second simulated diffraction signal is generated using a second number of diffraction orders using the same hypothetical profile used to generate the first simulated diffraction signal, where the first and second numbers of diffraction orders are different. The first and second simulated diffraction signals are compared. Based on the comparison of the first and second simulated diffraction signals, a determination is made as to whether to select the first or second number of diffraction orders.
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Doddi Srinivas
Jin Wen
Li Shifang
Lauchman L. G.
Morrison & Foerster / LLP
Timbre Technologies, Inc.
Underwood Jarreas C
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