Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate
2007-10-16
2007-10-16
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Position or displacement
Position transverse to viewing axis
C356S614000
Reexamination Certificate
active
11364972
ABSTRACT:
A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the semiconductor processing system. Analysis of images of the targets obtained by the wireless substrate-like sensor provides position and/or orientation information in at least three degrees of freedom. An additional target is affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor allows the measurement and compensation for pick-up errors.
REFERENCES:
patent: 3876833 (1975-04-01), Broers et al.
patent: 4074114 (1978-02-01), Dobras
patent: 4119381 (1978-10-01), Muka et al.
patent: 4180199 (1979-12-01), O'Rourke et al.
patent: 4701096 (1987-10-01), Fisher
patent: 4753569 (1988-06-01), Pryor
patent: 4791482 (1988-12-01), Barry et al.
patent: 4843287 (1989-06-01), Taft
patent: 5175601 (1992-12-01), Fitts
patent: 5232331 (1993-08-01), Kasai et al.
patent: 5265957 (1993-11-01), Moslehi et al.
patent: 5267143 (1993-11-01), Pryor
patent: 5298368 (1994-03-01), Merkel
patent: 5301248 (1994-04-01), Takanori et al.
patent: 5321989 (1994-06-01), Zimmer et al.
patent: 5435682 (1995-07-01), Crabb et al.
patent: 5444637 (1995-08-01), Smesny et al.
patent: 5521123 (1996-05-01), Komatsu et al.
patent: 5573728 (1996-11-01), Loesch et al.
patent: 5619027 (1997-04-01), Ackley
patent: 5642293 (1997-06-01), Manthey et al.
patent: 5675396 (1997-10-01), Tsunehiro
patent: 5721677 (1998-02-01), Pryor
patent: 5726066 (1998-03-01), Choi
patent: 5742702 (1998-04-01), Oki
patent: 5783341 (1998-07-01), Uzawa
patent: 5786704 (1998-07-01), Kim
patent: 5805289 (1998-09-01), Corby et al.
patent: 5956417 (1999-09-01), Pryor
patent: 5962909 (1999-10-01), Jerominek et al.
patent: 5969639 (1999-10-01), Lauf et al.
patent: 5973788 (1999-10-01), Pettersen et al.
patent: 5981116 (1999-11-01), Ota
patent: 6010009 (2000-01-01), Peterson et al.
patent: 6013236 (2000-01-01), Takahashi et al.
patent: 6022811 (2000-02-01), Yuuki et al.
patent: 6075909 (2000-06-01), Ressl
patent: 6106457 (2000-08-01), Perkins et al.
patent: 6129278 (2000-10-01), Wang et al.
patent: 6175124 (2001-01-01), Cole et al.
patent: 6206441 (2001-03-01), Wen et al.
patent: 6232615 (2001-05-01), Van Empel
patent: 6244121 (2001-06-01), Hunter
patent: 6275742 (2001-08-01), Sagues et al.
patent: 6300974 (2001-10-01), Viala et al.
patent: 6325356 (2001-12-01), Rozenblatt
patent: 6325536 (2001-12-01), Renken et al.
patent: 6326228 (2001-12-01), Hughes et al.
patent: 6389158 (2002-05-01), Pettersen et al.
patent: 6466325 (2002-10-01), Gooch
patent: 6468816 (2002-10-01), Hunter
patent: 6476825 (2002-11-01), Croy et al.
patent: 6480537 (2002-11-01), Agrawal et al.
patent: 6526668 (2003-03-01), Beckhart et al.
patent: 6532403 (2003-03-01), Beckhart et al.
patent: 6535650 (2003-03-01), Poulo et al.
patent: 6607951 (2003-08-01), Chen et al.
patent: 6625305 (2003-09-01), Keren
patent: 6628803 (2003-09-01), Wakashiro et al.
patent: 6681151 (2004-01-01), Weinzimmer et al.
patent: 6691068 (2004-02-01), Freed et al.
patent: 6734027 (2004-05-01), Jonkers
patent: 6801257 (2004-10-01), Segev et al.
patent: 6836212 (2004-12-01), Sawinski
patent: 6852975 (2005-02-01), Riegl et al.
patent: 6925356 (2005-08-01), Schauer et al.
patent: 6958768 (2005-10-01), Rao et al.
patent: 6966235 (2005-11-01), Paton
patent: 6985169 (2006-01-01), Deng et al.
patent: 6990215 (2006-01-01), Brown et al.
patent: 7035913 (2006-04-01), Culp et al.
patent: 7135852 (2006-11-01), Renken et al.
patent: 7149643 (2006-12-01), Renken et al.
patent: 7158857 (2007-01-01), Schauer et al.
patent: 7180607 (2007-02-01), Kyle et al.
patent: 7206080 (2007-04-01), Kochi et al.
patent: 2001/0050769 (2001-12-01), Fujinaka
patent: 2002/0006675 (2002-01-01), Shigaraki
patent: 2002/0028629 (2002-03-01), Moore
patent: 2002/0078770 (2002-06-01), Hunter
patent: 2002/0092369 (2002-07-01), Hunter
patent: 2002/0101508 (2002-08-01), Pollack
patent: 2002/0148307 (2002-10-01), Jonkers
patent: 2003/0001083 (2003-01-01), Corrado et al.
patent: 2003/0112448 (2003-06-01), Maidhof et al.
patent: 2003/0127589 (2003-07-01), Corrado et al.
patent: 2003/0160883 (2003-08-01), Ariel et al.
patent: 2003/0209097 (2003-11-01), Hunter
patent: 2003/0223057 (2003-12-01), Ramsey et al.
patent: 101065774 (2001-08-01), None
patent: 0583007 (1997-10-01), None
patent: 1150187 (2001-10-01), None
patent: 1184805 (2002-03-01), None
patent: 01082823 (1987-09-01), None
patent: 62054108 (1987-09-01), None
patent: 3214783 (1991-09-01), None
patent: 06163340 (1992-11-01), None
patent: 06076193 (1993-06-01), None
patent: 7074229 (1993-06-01), None
patent: 163340 (1994-06-01), None
patent: 7280644 (1995-10-01), None
patent: 8233855 (1996-09-01), None
patent: 11307606 (1998-04-01), None
patent: 11260706 (1999-09-01), None
patent: 2004-276151 (2004-10-01), None
patent: WO 00/12263 (2000-03-01), None
patent: WO 00/70495 (2000-11-01), None
patent: WO0165317 (2001-09-01), None
patent: WO 01/88976 (2001-11-01), None
patent: WO 02/17364 (2002-02-01), None
patent: WO 02/29385 (2002-04-01), None
patent: WO 02/47115 (2002-06-01), None
patent: WO 03/060989 (2003-07-01), None
International Preliminary Examination Report from Internatinal Application No. PCT/US03/03247, filed Feb. 4, 2003.
Invitation to Pay Fees from International Application No. PCT/US2005/007656, filed Mar. 3, 2005.
International Search Report from International Application No. PCT/US2005/007418, filed Mar. 9, 2005.
International Preliminary Examination Report from International Application No. PCT/US2005/007423, filed Mar. 9, 2005.
International Preliminary Examination Report and Written Opinion from International Application No. PCT/US2005/007656, filed Mar. 9, 2005.
U.S. Appl. No. 10/356,684, filed Jan. 31, 2003, Ramsey et al.
Notification of Transmittal of the International Preliminary Report from International Application No. PCT/US05/007423, filed Mar. 9, 2005; Copy of Notification of Transmittal of the International Search Report and Written Opinion from International Application No. PCT/US05/007423, filed Mar. 9, 2005.
Notification of Transmittal of the International Search Report and Written Opinion from International Application No. PCT/US05/007656, filed Mar. 9, 2005; Copy of Notification of Transmittal of the International Preliminary Report on Patentability from International Application No. PCT/US05/007656, filed Mar. 9, 2005.
Notification of Transmittal of International Preliminary Examination Report from International Application No. PCT/US05/007418, filed Mar. 9, 2005; Copy of Notification of the International Search Report and Written Opinion from International Application No. PCT/US05/007418, filed Mar. 9, 2005.
“Final Report on Wireless Wafer Proof-of-Principle,” J.B. Wilgen, et al., Oak Ridge National Laboratory, Jan. 18, 1998.
“Autonomous Micro-sensor Arrays for Process Control of Semiconductor Manufacturing Processes,” Darin Fisher, et al., Jun. 4, 1998.
NSF Award Abstact—#9628420, https://www.fastlane.nsf.gov/servlet/showaward?award=9628420, no date.
Gardner DelRae H.
Huntzinger Greg
Lassahn Jeffrey K.
Ramsey Craig C.
CyberOptics Semiconductor, Inc.
Stock, Jr. Gordon J.
Toatley , Jr. Gregory J.
Westman Champlin & Kelly P.A.
LandOfFree
Wireless substrate-like sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Wireless substrate-like sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wireless substrate-like sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3856325