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Particle detection system with coincident detection

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
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Particle inspection apparatus, exposure apparatus, and...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Particle inspection device and inspection method using the same

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Particle position correlator and correlation method for a surfac

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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Parts manipulation and inspection system and method

Optics: measuring and testing – Inspection of flaws or impurities
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Parts manipulation and inspection system and method

Optics: measuring and testing – Inspection of flaws or impurities
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Pattern defect inspecting apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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Pattern defect inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Patent

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Pattern defect inspection method, photomask manufacturing...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Pattern inspecting method and pattern inspecting apparatus

Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate

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Pattern inspecting method and pattern inspecting apparatus

Optics: measuring and testing – Inspection of flaws or impurities
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Pattern inspecting system and pattern inspecting method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Pattern inspecting system and pattern inspecting method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Pattern inspecting system and pattern inspecting method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Pattern inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Pattern inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Pattern inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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Pattern inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate

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Pattern inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Pattern inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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