Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2010-07-06
2011-11-15
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237100, C356S237300, C250S559400
Reexamination Certificate
active
08059269
ABSTRACT:
A particle inspection apparatus includes an irradiation unit configured to apply a light beam onto front and back surfaces of an object to be inspected, first and second detection units configured to detect scattering light from the surfaces, a calculation unit configured to conduct a particle inspection on the surfaces on the basis of outputs from the detection units, and a control unit configured to control the irradiation unit, the detection units, and the calculation unit. The irradiation unit can selectively apply the beam onto the front or back surface. The control unit causes the calculation unit to conduct the particle inspection on the inspection surface on which the light beam is selectively applied, on the basis of outputs made by the detection unit corresponding to simultaneous application and selective application of the light beam.
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Canon Kabushiki Kaisha
Canon U.S.A. Inc. I.P. Division
Nguyen Sang
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