4. Optics: measuring and testing
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Particle detecting system and method of detecting particles...

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Reexamination Certificate

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Particle detection device, lithographic apparatus and device...

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Reexamination Certificate

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Particle detection device, lithographic apparatus and device...

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Reexamination Certificate

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Photomask inspecting method and apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Patent

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Polarizing plates grading method

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Reexamination Certificate

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Process and device for high-definition measurement of intervals

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Patent

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Process and device for inspecting transparent material

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Patent

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Process and device for measuring the optical quality of a glazin

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Patent

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Projection exposure apparatus and method

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Reexamination Certificate

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