Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2007-04-17
2007-04-17
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S369000
Reexamination Certificate
active
10804926
ABSTRACT:
There is described an improved Surface Reflectance Instrument which achieves more complete detection of surface defects in the nature of small particles. One of the improvements is the use of an elliptical integrated cavity with internal surface mirrors, and another the use of a position sensing diode as the detector for the scattered light. Other improvements and the use of a stable laser at a particular wavelength resulting in greater detection are also described.
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Khazeni Kasra
Vurens Gerard H.
Caven & Aghevli LLC
Detschel Marissa J.
KLA-Tencor Technologies Corporation
Toatley , Jr. Gregory J.
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