Reflectance surface analyzer

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition

Reexamination Certificate

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C356S369000

Reexamination Certificate

active

10804926

ABSTRACT:
There is described an improved Surface Reflectance Instrument which achieves more complete detection of surface defects in the nature of small particles. One of the improvements is the use of an elliptical integrated cavity with internal surface mirrors, and another the use of a position sensing diode as the detector for the scattered light. Other improvements and the use of a stable laser at a particular wavelength resulting in greater detection are also described.

REFERENCES:
patent: 4585348 (1986-04-01), Chastang et al.
patent: 4681450 (1987-07-01), Azzam
patent: 4872758 (1989-10-01), Miyazaki et al.
patent: 4893932 (1990-01-01), Knollenberg
patent: 4908508 (1990-03-01), Dubbeldam
patent: 5076696 (1991-12-01), Cohn et al.
patent: 5102222 (1992-04-01), Berger et al.
patent: 5282217 (1994-01-01), Yamazaki
patent: 5311285 (1994-05-01), Oshige et al.
patent: 5335066 (1994-08-01), Yamada et al.
patent: 5438415 (1995-08-01), Kazama et al.
patent: 5517312 (1996-05-01), Finarov
patent: 5644562 (1997-07-01), De Groot
patent: 5726455 (1998-03-01), Vurens
patent: 5790259 (1998-08-01), Mizuhata et al.
patent: 5835220 (1998-11-01), Kazama et al.
patent: 6088092 (2000-07-01), Chen et al.
patent: 6134011 (2000-10-01), Klien et al.
patent: 6307627 (2001-10-01), Vurens
patent: 6384910 (2002-05-01), Vaez-Iravani et al.
patent: 6483586 (2002-11-01), Johs et al.
patent: 6515745 (2003-02-01), Vurens et al.
patent: 6859278 (2005-02-01), Johs et al.
patent: 7002675 (2006-02-01), MacGibbon et al.
Azzam R.M.A. “Ellipsometry” Handbook of Optics: Devices, Measurements & Properties vol. II, 2nd Edition, Bass, M. et al.(eds). McGraw Hill, Inc.: Chapter 27, pp. 27-1-27.26 (1995).
Meeks, S. et al. “Optical Surface Analysis of the Head-Disk-Interface of Thin Film Disks” Transactions of the ASME, presented Oct. 1994, Maui, HI.
Bright, D. et al. “Concentration histogram imaging: a quantitative view of related images” Microscopy: The Key Research Toll, Mar. 1992, pp. 21-28.
Klein, D. et al. “Measurements of Thin Film Disks by Surface Reflectance Analysis” SPIE Conference on Surface Characterization for Computer Disks, Wafers and Flat Panel Displays, San Jose, CA Jan. 1999, vol. 3619, pp. 18-26.
Optics, Miles V. Klein and Thomas E. Furtak, Second Edition, Wiley, pp. 134-135.
Miles V. Klein and Thomas E. Furtak, Optics & Laser Physics, Second Edition, Apr., 1986, pp. 134-135, Wiley.
Michael Bass, Handbook of Optics, Second Edition, vol. II, 1995, pp. 27.1, 27.15-17, 27.25, and 27.26, McGraw Hill, Inc.
David L. Klein, Gerard H. Vurens, Measurements of Thin Film Disks by Surface Reflectance Analysis, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, Jan. 28, 1999, pp. 18-26, vol. 3619, The Society of Photo-Optical Instrumentation Engineers, San Jose, California, USA.

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