Optics: measuring and testing – By light interference – Having wavefront division
Reexamination Certificate
2006-08-22
2006-08-22
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
By light interference
Having wavefront division
C356S515000
Reexamination Certificate
active
07095510
ABSTRACT:
The interferometer has a diffraction grating21, a condenser lens22, a transparent substrate23, a field lens24and an imaging device25arranged in this order. The transparent substrate23is arranged at the position in the optical axis direction where both focal spots of a zeroth-order diffracted light L21and a first-order diffracted light L22are formed. Formed on the transparent substrate23is a circular opaque zone23awhose central position is the central position of the focal spot of the first-order diffracted light L22. Formed at the center of the opaque zone23ais a pinhole23bwhose central position is the central position of the focal spot of the first-order diffracted light L22. The contrast of the interference fringes observed on the image device25is enhanced by the optical interference between the first-order diffracted light L22passing through the pinhole23band the zeroth-order diffracted light L21passing through the transparent substrate23.
REFERENCES:
patent: 6266147 (2001-07-01), Naulleau
patent: 57-64139 (1982-04-01), None
patent: 08-297009 (1996-11-01), None
Detschel Marissa J
Fish & Richardson P.C.
Pham Hoa Q.
Pulstec Industrial Co., Ltd.
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