Phase shifting grating-slit test for optical surface...

Details Phase shifting grating-slit test for optical surface... Phase shifting grating-slit test for optical surface...

2007-04-26

2009-12-01

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

Having wavefront division

C356S515000

Reexamination Certificate

active

07626708

ABSTRACT:
An optical system representing the configuration of a tested element disposed therein is provided. The optical system comprises a light source emitting a spatial-incoherent light having a phase shifting scheme toward the tested element and then forming an image with a transverse ray aberration on the image plane of the tested element; a spatial filter on the image plane to spatially filter the image formed by the tested element; and a detection module comprising a detector for receiving the spatially filtered image.

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patent: 5004337 (1991-04-01), Dey
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patent: 6409345 (2002-06-01), Molebny et al.
patent: 6932475 (2005-08-01), Molebny et al.
patent: 6940649 (2005-09-01), Dowski, Jr.
patent: 7554731 (2009-06-01), Dowski, Jr.
patent: 7554732 (2009-06-01), Dowski, Jr.

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