4. Optical: systems and elements
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Projection display system with varying light source

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Projection display with color separation/synthesizing prism...

Optical: systems and elements – Single channel simultaneously to or from plural channels – By partial reflection at beam splitting or combining surface
Reexamination Certificate

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Projection display with three polarization beam splitter prisms

Optical: systems and elements – Polarization without modulation – By relatively adjustable superimposed or in series polarizers
Reexamination Certificate

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Projection display with two reflective light valves

Optical: systems and elements – Polarization without modulation – By relatively adjustable superimposed or in series polarizers
Reexamination Certificate

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Projection display-use screen and projection display system...

Optical: systems and elements – Projection screen
Reexamination Certificate

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Projection exposure apparatus

Optical: systems and elements – Diffraction
Patent

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Projection exposure apparatus

Optical: systems and elements – Diffraction – From grating
Patent

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Projection exposure apparatus

Optical: systems and elements – Deflection using a moving element
Patent

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Projection exposure apparatus

Optical: systems and elements – Lens – With light limiting or controlling means
Patent

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Projection exposure apparatus

Optical: systems and elements – Polarization without modulation
Patent

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Projection exposure apparatus

Optical: systems and elements – Lens
Reexamination Certificate

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Projection exposure apparatus

Optical: systems and elements – Lens – With reflecting element
Patent

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Projection exposure apparatus and device manufacturing method

Optical: systems and elements – Diffraction – From grating
Reexamination Certificate

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Projection exposure apparatus and method

Optical: systems and elements – Lens – With reflecting element
Reexamination Certificate

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Projection exposure apparatus and method

Optical: systems and elements – Lens – With reflecting element
Reexamination Certificate

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Projection exposure apparatus and method

Optical: systems and elements – Lens – With reflecting element
Reexamination Certificate

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Projection exposure apparatus and method

Optical: systems and elements – Lens – With reflecting element
Reexamination Certificate

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Projection exposure apparatus and polarizer

Optical: systems and elements – Polarization without modulation – Polarizarion by dichroism
Patent

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Projection exposure apparatus for microlithography

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Projection exposure apparatus using wavefront detection

Optical: systems and elements – Optical modulator
Reexamination Certificate

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