Microelectronic devices and methods for packaging...
Microencapsulation processes and compositions for...
Micromachine structure
Micromachine structure system and method for manufacturing same
Micromachined electrostatic actuator with air gap
Micromachined high reflectance deformable mirror
Micromachined linear light valve
Micromachined tunable optical filter with controllable...
Micromagnetic light modulator
Micromechanical device and method for non-contacting...
Micromechanical device with tilted electrodes
Micromechanical light steering optical switch
Micromechanical membrane tilt-mirror switch
Micromechanical modulator
Micromechanical modulator
Micromechanical modulator
Micromechanical modulator and methods for fabricating the same
Micromechanical modulator having enhanced performance
Micromechanical optical modulator having a reduced-mass composit
Micromechanical optical modulator with linear operating characte