Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-04-14
2010-12-21
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S292000, C359S295000, C359S298000, C359S318000, C345S108000, C348S771000
Reexamination Certificate
active
07855825
ABSTRACT:
A micro-mechanical structure system according to the present invention includes: a movable structure5, at least a portion of the movable structure5being formed of a single-crystalline material; an elastic supporting member10for supporting the movable structure5; a stationary electrode section13, 25at least partially opposing the movable structure5; and a base22which has a circuit section and to which the stationary electrode13, 25is affixed. The stationary electrode section13, 25includes a first electrode layer (upper stationary electrode layer)13positioned relative to the movable structure5and a second electrode layer (lower stationary electrode layer)25positioned relative to the base22, the first electrode layer13and the second electrode layer25being bonded to each other via adhesion layers15and16.
REFERENCES:
patent: 6618186 (2003-09-01), Kaeriyama
patent: 2003/0174934 (2003-09-01), Ishii et al.
patent: 2004/0061917 (2004-04-01), Mushika et al.
patent: 2002-189178 (2002-07-01), None
patent: 2002-267996 (2002-09-01), None
patent: 2002-321198 (2002-11-01), None
patent: 2004-330363 (2004-11-01), None
patent: 02/061488 (2002-08-01), None
International Search Report for corresponding Application No. PCT/JP2006/307922 dated Jul. 18, 006, (2006).
PCT/ISA/237 and concise explanation, (2006).
Kajino Osamu
Mushika Yoshihiro
Tomita Hironori
Lester Evelyn A.
Panasonic Corporation
Renner , Otto, Boisselle & Sklar, LLP
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