Micromechanical modulator

Details Micromechanical modulator Micromechanical modulator

1995-06-07

1997-08-05

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359248, G02B 2600

Patent

active

056548192

ABSTRACT:
A method and apparatus for modulating an optical signal, and a method for fabricating such an apparatus, are disclosed. The modulator comprises a membrane, which consists of at least three layers, and a substrate, spaced to form an air gap. The layers of the membrane are characterized by a relationship between the refractive indices of the layers and the refractive index of the substrate. The membrane is suspended in a first position over the substrate by a flexible support arrangement. A biasing force is applied to the membrane and the substrate to create an electrostatic force to move the membrane towards the substrate to a second position. The reflectivity of the device to an optical signal changes as the membrane moves from the first position to the second position, thereby modulating the signal.

REFERENCES:
patent: 5500761 (1996-03-01), Goossen et al.

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