Micromechanical modulator having enhanced performance

Details Micromechanical modulator having enhanced performance Micromechanical modulator having enhanced performance

1997-07-25

1999-02-09

Epps, Georgia

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359291, G02B 2600

Patent

active

058702210

ABSTRACT:
A modulator having low insertion and a broad operating bandwidth is disclosed. The modulator has a movable membrane that is spaced from a substrate. The reflectivity of the movable membrane, and the reflectivity of the subtrate/gap interface are unequal. In particular, relative to the membrane, the substrate has a lower reflectivity. Device finesse is dictated by the lower reflectivity "mirror," i.e., the substrate. The substrate configuration thus provides a broad operating bandwidth while the higher reflectivity membrane provides low insertion loss.

REFERENCES:
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patent: 5589974 (1996-12-01), Goossen et al.
patent: 5646772 (1997-07-01), Yurke
patent: 5659418 (1997-08-01), Yurke
patent: 5677783 (1997-10-01), Bloom et al.
patent: 5701193 (1997-12-01), Vogel et al.
patent: 5710656 (1998-01-01), Goossen
patent: 5793519 (1998-08-01), Furlani et al.

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