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Microelectromechanical device array and method for driving...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical device array apparatus and method for...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical device with continuously variable...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical device with optical function...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical device with reset electrode

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical device with reset electrode

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical device with restoring electrode

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical device with spacing layer

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical device with spacing layer

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical devices with low inertia movable...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical elevating structures

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical mirror and mirror array

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical modulation device and...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical optical switch and method of...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical structure comprising distinct parts...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical systems device and method for...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical systems display element with...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectromechanical television scanning device and method for

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectronic devices and methods for packaging...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Microelectronic devices and methods for packaging...

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