Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-07-19
2005-07-19
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000, C359S295000, C359S224200, C359S228000, C359S231000, C359S566000, C359S573000, C345S084000, C349S158000, C385S037000
Reexamination Certificate
active
06919983
ABSTRACT:
An electrostatic micromechanical device with continuously variable displacement, that includes: a movable member having a first electrode; an opposing surface having a second electrode; a channel separating the movable member from the opposing surface; a liquid situated in the channel, wherein the liquid has a sufficiently high dielectric constant so as to enable continuously variable and stable control of a displacement of the movable member over a travel range spanning at least half of the channel; the displacement being a result of a voltage applied between the first electrode and the second electrode; and at least one solid dielectric layer physically situated between the first electrode and the second electrode.
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Ben Loha
Shaw Stephen H.
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