Microelectromechanical device with optical function...

Details Microelectromechanical device with optical function... Microelectromechanical device with optical function...

2007-07-02

2009-11-03

Choi, William C (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S198100, C359S224200

Reexamination Certificate

active

07612932

ABSTRACT:
A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element includes a deformable layer and a reflective element. The actuation electrode is between the deformable layer and the reflective element.

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