Microelectromechanical device array apparatus and method for...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S290000

Reexamination Certificate

active

07626752

ABSTRACT:
A microelectromechanical device array apparatus is provided and includes: an device array one-dimensionally or two-dimensionally arranged with devices including a movable portion having movable electrodes and fixed electrodes facing to the movable portion for displacing the movable portion to one of two different positions; and a drive circuit for inclining the movable portion by writing an device-displacing signal to the fixed electrodes and applying a control voltage to the movable electrodes when the device in a first state of controlling to displace the position of the movable portion from one to the other of the two different positions and the device in a second state of controlling to maintain the position of the movable portion at one position of the two different positions, there is brought about a state in which the device in the first state crosses over pull-out and the device in the second state does not cross over the pull-out.

REFERENCES:
patent: 7095545 (2006-08-01), Regan
patent: 7221498 (2007-05-01), Richards et al.
patent: 10-48543 (1998-02-01), None

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