Microelectromechanical devices with low inertia movable...

Details Microelectromechanical devices with low inertia movable... Microelectromechanical devices with low inertia movable...

2007-12-25

2007-12-25

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S225100

Reexamination Certificate

active

11135230

ABSTRACT:
A microelectromechanical device having a movable element with low mass inertia is disclosed herein. The movable element is held on a substrate such that the element is capable of rotating relative to the substrate; and the element has a mass inertia of 1.2×10−24kg·m2or less.

REFERENCES:
patent: 7220009 (2007-05-01), Shimada et al.
patent: 2004/0125347 (2004-07-01), Patel et al.
patent: 2006/0220199 (2006-10-01), Duboc et al.

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