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Illumination apparatus and projection exposure apparatus

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Illumination optical apparatus and optical apparatus

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Illumination optical system and method of making exposure...

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Illumination optical system, exposure apparatus, and device...

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Illumination system and exposure apparatus

Optical: systems and elements – Lens – With field curvature shaping
Patent

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Illumination system with reduced energy loading

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Illumination unit, projecting engine and method for...

Optical: systems and elements – Lens – With field curvature shaping
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Image projection lens

Optical: systems and elements – Lens – With field curvature shaping
Patent

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Image-forming optical system

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Imaging lens system with high resolution and compact size

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Imaging optical system

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Imaging optical system

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Imaging optical system

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Imaging optical system

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Imaging system

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Imaging systems

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Imaging systems

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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