Illumination optical system, exposure apparatus, and device...

Details Illumination optical system, exposure apparatus, and device... Illumination optical system, exposure apparatus, and device...

2007-01-30

2007-01-30

Spector, David N. (Department: 2873)

Optical: systems and elements

Lens

With field curvature shaping

C355S117000, C355S117000, C359S434000, C359S690000

Reexamination Certificate

active

11105866

ABSTRACT:
Disclosed is an illumination optical system having an imaging optical system for imaging a predetermined object plane upon an image plane, by use of light supplied from an integrator that functions to produce a plurality of light sources using light from a light source. In one preferred form of the invention, the imaging optical system includes, in an order from a light incidence side thereof, a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power, wherein the second lens group includes a concave lens at a light exit side thereof and wherein the third lens group includes a convex lens at a light entrance side thereof. The position of intersection between an optical axis of the imaging optical system and a principal ray of abaxial light is defined between the second lens group and the third lens group.

REFERENCES:
patent: 5982558 (1999-11-01), Fürter et al.
patent: 6560012 (2003-05-01), Adachi et al.
patent: 6765649 (2004-07-01), Orino
patent: 6856377 (2005-02-01), Suenaga
patent: 6995918 (2006-02-01), Terasawa et al.
patent: 2003/0197847 (2003-10-01), Shinoda
patent: 2002-55277 (2002-02-01), None
patent: 2002-353100 (2002-12-01), None
patent: 09-197270 (2003-10-01), None
patent: 2003-318086 (2003-11-01), None
English Abstract of 2003-318086 (Item A).
English Abstract of 2002-353100 (Item B).
English Abstract of 2002-55277 (Item C).
English Abstract of 09-197270 (Item D).

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