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Catadioptric objective

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Catadioptric projection system, and exposure apparatus...

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Color corrected projection lens

Optical: systems and elements – Lens – With field curvature shaping
Patent

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Color corrected projection lenses employing diffractive...

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Color corrected projection lenses for use with curved faceplate

Optical: systems and elements – Lens – With field curvature shaping
Patent

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Color-corrected projection lenses for use with pixelized panels

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Compact 1½-waist system for sub 100 nm ArF lithography

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Compact projection lenses for use with large format...

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Conductive lens

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Contact printing using a magnified mask image

Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate

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Coupled lens assembly

Optical: systems and elements – Lens – With field curvature shaping
Patent

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