Illumination system and exposure apparatus

Details Illumination system and exposure apparatus Illumination system and exposure apparatus

1997-05-29

1999-11-23

Epps, Georgia

Optical: systems and elements

Lens

With field curvature shaping

359650, 359651, 359683, 355 53, 353 38, 362268, G02B 300, G02B 1514, G03B 2742, G03B 2114

Patent

active

059910887

ABSTRACT:
An illumination system includes a light source and an optical system for projecting light from the light source to a surface to be illuminated, wherein the optical system includes an optical element having a paraxial power of substantially zero and having an aspherical surface, and the optical element is movable along an optical axis when an illuminance distribution on the surface to be illuminated is to be changed.

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patent: 5675401 (1997-10-01), Wangler et al.
patent: 5745297 (1998-04-01), Kaneko et al.
patent: 5805344 (1998-09-01), Sasaya et al.

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