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Photo-tunable liquid microlens

Optical: systems and elements – Lens – Fluid
Reexamination Certificate

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Polymer-optical liquid matrix for use as a lens element

Optical: systems and elements – Lens – Fluid
Patent

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Pressure proof optical apparatus

Optical: systems and elements – Lens – Fluid
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Producing a transparent optical element comprising a...

Optical: systems and elements – Lens – Fluid
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Projection lens, in particular for microlithography

Optical: systems and elements – Lens – Fluid
Reexamination Certificate

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Projection objective of a microlithographic exposure apparatus

Optical: systems and elements – Lens – Fluid
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Projection objective of a microlithographic projection...

Optical: systems and elements – Lens – Fluid
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Projection objective of a microlithographic projection...

Optical: systems and elements – Lens – Fluid
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Projection optical system and method for photolithography...

Optical: systems and elements – Lens – Fluid
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