Projection optical system and method for photolithography...

Details Projection optical system and method for photolithography... Projection optical system and method for photolithography...

2007-10-18

2009-08-25

Hasan, Mohammed (Department: 2873)

Optical: systems and elements

Lens

Fluid

C359S649000, C359S726000

Reexamination Certificate

active

07580197

ABSTRACT:
A liquid immersion optical system includes a first optically transparent member and a second optically transparent member, arranged in an optical path between the first optically transparent member and an object. A first space between the first optically transparent member and the second optically transparent member is fillable with a first liquid. A second space between the second optically transparent member and the object is fillable with a second liquid. The second optically transparent member is detachably arranged in the optical path between the first optically transparent member and the object.

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