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Low surface energy passivation layer for micromechanical devices

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent

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Lubricating micro-machined devices using fluorosurfactants

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate

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Lubricating micro-machined devices using fluorosurfactants

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate

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