Silicon gyro with integrated driving and sensing structures
Silicon gyroscope and method of driving the same
Silicon integrated angular rate sensor
Silicon micro-machined accelerometer using integrated electrical
Silicon micromachine with sacrificial pedestal
Silicon micromachined accelerometer
Silicon micromachined accelerometer/seismometer and method...
Silicon micromachined motion sensor and method of making
Silicon micromechanical gyroscope
Single axis attitude sensor
Single axis crystal constrained temperature compensated digital
Single axis rate sensor noise reduction
Single chip tri-axis accelerometer
Single ended tuning fork inertial sensor and method
Single ended tuning fork internal sensor and method
Single plate capacitive acceleration derivative detector
Single proof mass, 3 axis MEMS transducer
Single transducer levitator
Single-axis centrifugal rate sensor
Single-side microelectromechanical capacitive accelerometer...