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Silicon gyro with integrated driving and sensing structures

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Silicon gyroscope and method of driving the same

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Silicon integrated angular rate sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Silicon micro-machined accelerometer using integrated electrical

Measuring and testing – Speed – velocity – or acceleration – Structural installation or mounting means
Patent

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Silicon micromachine with sacrificial pedestal

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Silicon micromachined accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Silicon micromachined accelerometer/seismometer and method...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Silicon micromachined motion sensor and method of making

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Silicon micromechanical gyroscope

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Single axis attitude sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Single axis crystal constrained temperature compensated digital

Measuring and testing – Speed – velocity – or acceleration – Temperature compensator
Patent

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Single axis rate sensor noise reduction

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Single chip tri-axis accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Single ended tuning fork inertial sensor and method

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Single ended tuning fork internal sensor and method

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Single plate capacitive acceleration derivative detector

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Single proof mass, 3 axis MEMS transducer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Single transducer levitator

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Single-axis centrifugal rate sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Single-side microelectromechanical capacitive accelerometer...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Utility Patent

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